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经营范围
发明名称
Process of supplying moisture at small flow rate
摘要
申请公布号
IL127395(D0)
申请公布日期
1999.10.28
申请号
IL19980127395
申请日期
1998.12.03
申请人
FUJIKIN INCORPORATED;HITACHI, LTD.
发明人
分类号
C01B5/00;F22B1/00;H01L21/316;(IPC1-7):C01B
主分类号
C01B5/00
代理机构
代理人
主权项
地址
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