发明名称 Steady autorotation of wire bonding capillary
摘要 A rotation device (100) provides steady, non-stepwise rotation of a wire bonding capillary (10) about the longitudinal axis of the capillary (10). This enables the capillary (10) to be rotated to different angular alignments to perform wire bonding in different directions. The rotation device can include gears (111, 122) or friction pads (211, 222). At least a part (110) of the rotation device (120) is coupled to the capillary (10). Another part (120) of the rotation device (100) is separate from the capillary (10) but is engageable with the first part to provide rotation. Sensing devices (610, 620) may be used to provide precise initial alignment of the capillary (10) and to assist in providing and confirming precise alignment and realignment of the capillary to various bonding directions during wire bonding. A computer may be used to provide automated control and rotation of the sensing devices and the rotation device.
申请公布号 US5971248(A) 申请公布日期 1999.10.26
申请号 US19970993659 申请日期 1997.12.18
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 KODURI, SREENIVASAN K.
分类号 H01L21/60;B23K20/00;H01L21/00;H01L21/603;(IPC1-7):H01L21/60 主分类号 H01L21/60
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