Vorrichtung zur Projecktion eines Maskenmusters auf ein Substrat,申请号DE19916030783T-传众专利搜索

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发明名称	Vorrichtung zur Projecktion eines Maskenmusters auf ein Substrat
摘要
申请公布号	DE69130783(T2)	申请公布日期	1999.10.21
申请号	DE19916030783T	申请日期	1991.07.05
申请人	ASM LITHOGRAPHY B.V., VELDHOVEN	发明人	VAN DEN BRINK, MARINUS AART;LINDERS, HENK FREDERIK DIRK;WITTEKOEK, STEFAN
分类号	G03F1/08;G03F7/20;G03F9/00;H01L21/027;H01L21/30;(IPC1-7):G03F9/00;G03F1/14	主分类号	G03F1/08
代理机构		代理人
主权项
地址

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