| 摘要 |
<p>PROBLEM TO BE SOLVED: To remarkably reduce a manufacturing cost and a material cost by manufacturing a chamber by not cutting an ingot but welding. SOLUTION: When a cassette chamber having no bottom is manufactured, segmental bodies 1, 2 for the chamber are manufactured by extrusion or the like and joined by electronic beam welding after cutting each extruded material into a prescribed height. Thus, since weld zones 4 are formed in side walls, they are ground to flatten the side walls. When a bottomed cylindrical transfer chamber is manufactured, a disk and a ring shaped member are separately manufactured as well and both are joined by electronic beam welding.</p> |
