| 摘要 |
PROBLEM TO BE SOLVED: To measure minute dimensions of a matter subjected to dimensional measurement present in a narrow place by regulating the relative position of the object surface of a contact scope to the matter, sensing that it gets close in a specified range by a sensor, and then displacing the horizontal relative positions of the both by precision operation. SOLUTION: A horizontal displacing means 5 is operated so that a circular hole 41 is entered into the field of view of a contact scope 1, a vertical position regulating means 2 is operated to approach the objective surface 11 of the contact scope 1 to the surface of an object 4 with a space range of 0-5μm, preferably, 0.2-5μm. The displacing means 5 is precisely operated in the state where this space is held so that the left side of the periphery 42 of the circular hole 41 makes contact with the vertical line 122 of a cross mark 12 engraved on the objective surface 11, and the upper side of the periphery 42 of the circular hole 41 makes contact with the horizontal line 121 thereof. Then the displacing means 5 is operated while observing the field of view of the contact scope 1 to bring the right side of the periphery of the circular hole 41 into contact with the vertical line 122, and the precise dimension of the hole is provided from the moving distance.
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