| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas purifying method and device for effectively and easily removing a non-methane hydrocarbon increasing contact angles between a base material and a base plate surface or converting it into a substance being not concerned with increase of the contact angle. SOLUTION: In the gas purifying device for preventing contamination of the base material housed in a space or the base plate surface, the device consists of the space having a photo-catalyst 6 installed with 50-50000 cm<2> surface area per 1 m<3> of the space volume in which the gas 4 containing at least hydrocarbon 4, which comes into contact with the base material or the base plate 2, is passed through, and the concentration of the non-methane hydrocarbon in the gas is purified by less than 0.2 ppm, and an ultraviolet ray source 5 for irradiating the photo-catalyst 6 with 0.01-10 mW/cm<2> ultraviolet rays. Also, a photoelectron discharge material making the fine particle concentration in the gas into less than class 10, and an electrode can be installed in the space irradiated with the ultraviolet rays, and inert gas can be sealed in the space. |
