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发明名称
FORMATION OF METALLIC THIN FILM
摘要
申请公布号
JPH11286789(A)
申请公布日期
1999.10.19
申请号
JP19980108687
申请日期
1998.04.03
申请人
HITACHI ELECTRON ENG CO LTD
发明人
OYAMA KATSUMI;SUZUKI SHINICHI;HACHITANI MASAYUKI
分类号
C23C26/00;C23C26/02;(IPC1-7):C23C26/00
主分类号
C23C26/00
代理机构
代理人
主权项
地址
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