FLOW DEFECTION ELEMENT, FLOW SENSOR, AND MANUFACTURE OF FLOW DETECTION ELEMENT

摘要

PROBLEM TO BE SOLVED: To enhance measuring accuracy and reliability and to simplify manufacturing processes by decreasing fluctuation of resistance due to the insufficient coverage of a protective film in a heat-sensitive flow detection element or flow sensor. SOLUTION: A heat-sensitive flow detection element or flow sensor has an insulating support film 2 formed on the surface of a flat base material 1 and a heat-sensitive resistance film 11 (heating part) formed on the support film 2. An insulating thin film 18 made by an oxide film made from TEOS or H2 O2 is provided on the heat-sensitive resistance film 11 or the support film 2 and a protective film 3 is formed on the insulating thin film 18. A difference in height of the heat-sensitive resistance film 11 is reduced or eased by the insulating thin film 18, whereby fluctuation of resistance value caused by the insufficient coverage of the protective film 3 is reduced, leading to enhanced measuring accuracy and reliability and simplified manufacturing processes.