发明名称 |
Radiation sensitive compositions and methods |
摘要 |
The present invention provides radiation sensitive compositions and methods that comprise novel means for providing relief images of enhanced resolution. In one aspect the invention provides a method for controlling diffusion of photogenerated acid comprising adding a polar compound to a radiation sensitive composition and applying a layer of the composition to a substrate; exposing the composition layer to activating radiation whereby a latent image is generated comprising a distribution of acid moieties complexed with the polar compound; and treating the exposed composition layer to provide an activating amount of acid.
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申请公布号 |
US5968712(A) |
申请公布日期 |
1999.10.19 |
申请号 |
US19930152084 |
申请日期 |
1993.11.12 |
申请人 |
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发明人 |
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分类号 |
G03F7/004;G03F7/022;G03F7/028;G03F7/032;G03F7/038;G03F7/039;G03F7/30;G03F7/38;G03F7/40;(IPC1-7):G03F7/38 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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