FORMATION OF ZINC OXIDE THIN FILM, PRODUCTION OF SEMICONDUCTOR DEVICE SUBSTRATE USING THE SAME, AND PRODUCTION OF PHOTOVOLTAIC ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a zinc oxide thin film by electrodeposition from an aq. soln. capable of preventing the deposition of film on the rear face of a substrate. SOLUTION: An electrode 214 for preventing the deposition of film on the rear face is provided in an aq. soln. 202 contg. zinc ion, and a current is applied so that the relation between each of the potentials is counter electrode 204 > substrate 203 > electrode 214. When the method is applied to a solar cell preparing process, the short-circuit current density of the solar cell and the conversion efficiency are increased, and further the yield characteristic and durability are improved.