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经营范围
发明名称
TRENCH FORMING METHOD AND MANUFACTURE THEREOF
摘要
申请公布号
JPH11288923(A)
申请公布日期
1999.10.19
申请号
JP19980091845
申请日期
1998.04.03
申请人
SONY CORP
发明人
WATANABE SHINYA
分类号
H01L21/28;H01L21/302;H01L21/3065;H01L21/768;(IPC1-7):H01L21/306
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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