| 摘要 |
PROBLEM TO BE SOLVED: To provide a process for producing a precursor solution which can form a coating fluid which, when used to form a thin ferroelectric film by the sol-gel method, can form a thin film having such a thickness as to exhibit its characteristics not by a multi-layer coating operation but by a single coating operation. SOLUTION: A Ti alkoxide oligomer having a cyclic or ladder structure is synthesized by the hydrolytic polycondensation of a Ti alkoxide. A Zr alkoxide oligomer is synthesized by the hydrolytic polycondensation of a Zr alkoxide, the Ti alkoxide oligomer is pre-hydrolyzed, and the hydrolyzate is reacted with a Zr alkoxide oligomer to obtain a Ti-O-Zr precursor. The Ti-O-Zr precursor is reacted with a Pb alkoxide to obtain a Pb(Ti-O-Zr) precursor. |
