| 摘要 |
PROBLEM TO BE SOLVED: To reduce variation and yield of an integrated circuit product by transmitting axially driving movement alone out of rotary movement and axially driving movement which are carried out by a board-carrying tray body to a board holding part whereto a board is attached when a board is mounted on a board holder. SOLUTION: A pin 27 of a board-carrying tray body 25 is thrusted while it is subjected to rotary movement along a screw-like groove 36 of a board holder 34 at the time when a board 21 is mounted on the board holder 34, and a D-surface (a rear of a film formation surface) of the board 21 is brought into contact with an E-surface of the board holder 34. The board carrying tray body 25 is rotated successively axially while being pushed against reaction of a spring 32 and pressing force of the board carrying tray 25 is transmitted from a bearing holder 30 to a bearing 31 through the spring 32 by a guide rod 29. Thereby, dispersion and yield of an integrated circuit product can be reduced. |
