| 发明名称 |
METHOD OF FORMING TRENCH ISOLATORS OF TRANSISTOR, WITHOUT USING CHEMICAL-MECHANICAL POLISHING METHOD |
| 摘要 |
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| 申请公布号 |
JPH11284064(A) |
申请公布日期 |
1999.10.15 |
| 申请号 |
JP19990006782 |
申请日期 |
1999.01.13 |
| 申请人 |
TEXAS INSTR INC <TI> |
发明人 |
SHAWN T WALSH;JOHN E CAMPBELL;JAMES B FREEDMAN;THOMAS M PARLILE;DELL E JAN;JOSHUA J ROBINS;BYRON T AHLBURN;SUE ELEN CRANK |
| 分类号 |
H01L21/302;H01L21/3065;H01L21/3105;H01L21/311;H01L21/316;H01L21/318;H01L21/76;H01L21/762;(IPC1-7):H01L21/76;H01L21/306 |
主分类号 |
H01L21/302 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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