SHOWER HEAD AND FILM FORMING APPARATUS USING THE SAME,申请号KR19960011599-传众专利搜索

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发明名称	SHOWER HEAD AND FILM FORMING APPARATUS USING THE SAME
摘要
申请公布号	KR100224461(B1)	申请公布日期	1999.10.15
申请号	KR19960011599	申请日期	1996.04.17
申请人	TOKYO ELECTRON LIMITED	发明人	HUZIKAWA, YUICHIRO;HATANO, DACHUO;MURAKAMI, SAISHI
分类号	C23C16/44;C23C16/455;H01L21/205;H01L21/285;(IPC1-7):H01L21/00	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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