发明名称 POLISHING DEVICE AND POLISHING METHOD
摘要 <p>A polishing device capable of polishing a work by rotating the work while pressing a polishing tape against the work by a pressing member from its rear side, comprising an oscillating type holding device (260) which holds the pressing member (96) oscillatingly about an oscillating axis (Ls) spatially crossing at right angle a rotating axis of the work (10) with respect to a cartridge (72) for holding the pressing member (96) in order to increase a follow-up capability of the pressing member to the work, whereby the pressing member (96) can follow up the work (10) because the pressing member (96) is oscillated relative to the cartridge (72) during polishing.</p>
申请公布号 WO1999051396(P1) 申请公布日期 1999.10.14
申请号 JP1999001645 申请日期 1999.03.30
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