发明名称 Mengenverstärkereinrichtung für Fluidströme
摘要 The invention relates to a liquid flow amplification device comprising at least one micromechanic, fluidically regulated, flow amplifier (2) produced in a microstructuring process. The amplifier consists of a chamber defined by two stratified compacts (3, 4), whereby said chamber is sub-divided by means of a movable control membrane (6). Fluidic regulation enables the control membrane (6) to be shifted between an open position and a closed position wherein it controls the junction between the feed channel (13) and the discharge channel (14).
申请公布号 DE19816283(A1) 申请公布日期 1999.10.14
申请号 DE19981016283 申请日期 1998.04.11
申请人 FESTO AG & CO 发明人 STOLL, KURT;WEINMANN, MICHAEL;POST, PETER;VOLLMER, HERBERT
分类号 F15B13/00;F15B13/08;F15C5/00;F16K7/17;F16K99/00;(IPC1-7):F16K7/00;F16K7/12 主分类号 F15B13/00
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