发明名称 |
Mengenverstärkereinrichtung für Fluidströme |
摘要 |
The invention relates to a liquid flow amplification device comprising at least one micromechanic, fluidically regulated, flow amplifier (2) produced in a microstructuring process. The amplifier consists of a chamber defined by two stratified compacts (3, 4), whereby said chamber is sub-divided by means of a movable control membrane (6). Fluidic regulation enables the control membrane (6) to be shifted between an open position and a closed position wherein it controls the junction between the feed channel (13) and the discharge channel (14).
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申请公布号 |
DE19816283(A1) |
申请公布日期 |
1999.10.14 |
申请号 |
DE19981016283 |
申请日期 |
1998.04.11 |
申请人 |
FESTO AG & CO |
发明人 |
STOLL, KURT;WEINMANN, MICHAEL;POST, PETER;VOLLMER, HERBERT |
分类号 |
F15B13/00;F15B13/08;F15C5/00;F16K7/17;F16K99/00;(IPC1-7):F16K7/00;F16K7/12 |
主分类号 |
F15B13/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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