发明名称 A CMOS INTEGRATED CIRCUIT HAVING PMOS AND NMOS DEVICES WITH DIFFERENT GATE DIELECTRIC LAYERS
摘要 A CMOS integrated circuit (200) having a PMOS (250) and NMOS (210) device with different gate dielectric layers. According to the present invention, an NMOS transistor (210) is formed on a p-type conductivity region (212) of a semiconductor substrate (202). The NMOS transistor (210) has first gate dieletric layer (220) formed on the p-type conductivity region. A PMOS transistor (250) is formed on a n-type conductivity region (252) of the semiconductor substrate (202). The PMOS transistor (250) has a second gate dielectric layer (260) wherein the second gate dielectric layer (260) has a different composition than the first gate dielectric layer (220).
申请公布号 WO9952151(A1) 申请公布日期 1999.10.14
申请号 WO1998US06610 申请日期 1998.04.03
申请人 INTEL CORPORATION 发明人 CHAU, ROBERT, S.
分类号 H01L21/8238;H01L27/092;(IPC1-7):H01L29/768;H01L29/78 主分类号 H01L21/8238
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