OPTICAL WAVEGUIDE COMPONENT AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To obtain a new optical waveguide component which has a cyclic polarization inversion structure with a thick polarization inverting layer formed in a ferroelectric single-crystal thin film as an optical waveguide component equipped with a ferroelectric single-crystal substrate and ferroelectric single- crystal thin film formed thereupon. SOLUTION: An optical waveguide component is equipped with a ferroelectric single-crystal substrate 11 which has a cyclic recessed groove structure on its main surface and is made into a single domain almost in parallel with the main surface, and at least a single-layered ferroelectric single-crystal thin film which is formed on the main surface of the substrate 11 by epitaxial growth. The ferroelectric single-crystal thin film has a cyclic polarization inversion structure and is characterized by the fact that the angleθbetween the polarization direction 14 of the cyclic polarization inversion structure and the groove direction 13 of the cyclic recessed groove structure on the main surface of the substrate 11 is 10 to 80 degrees.