Accurate positioning of micro-parts to tolerances of few microns on microstructure using pneumatic grippers

摘要

The connected micro-parts (2) are sucked onto a supporting plate (4) and held in a desired position and arrangement. Individual components are then separated while the vacuum maintains their individual positions. A gripper is then located above a component and a fluid introduced between the component and gripper surface to center the component. The gripper then lifts and accurately locates the component on a microstructure before releasing. Preferred Features: Vacuum is maintained on remaining components during the lifting and positioning of a component. The quantity of water viscosity fluid required for lifting a micro-component weighing 1 g is 20-60 nl/mm<2>.