Method of generating real-time stereo images of specimens using a scanning particle microscope
摘要
Two image signals are produced from each scanning point by turning the particle beam of the microscope by an angle +phi or -phi to the sample normal at each scanning point, and image signals of the scanning point is detected in each of the two angle positions. Alternatively, a raster microscope with two particle beams is used.
申请公布号
EP0949652(A1)
申请公布日期
1999.10.13
申请号
EP19990105288
申请日期
1999.03.15
申请人
INSTITUT FUER FESTKOERPER- UND WERKSTOFFORSCHUNG DRESDEN E.V.
发明人
MENZEL, SIEGFRIED, DR.;BUERKE, AXEL;GOEBEL, THOMAS;WETZIG, KLAUS, PROF. DR.