发明名称 |
Optical near-field probe and process for its manufacture |
摘要 |
An optical near-field probe (1) includes a carrier component (10), which carries a tip (40), and has only one membrane (11, 20), transparent at least in the area of the tip (40), which is mounted on the light emission surface (9) of an optical waveguide (2) that is made of a rigid material such as glass or plastic. The dimensions of the membrane (11, 20), at least in one direction in the membrane plane, are less than or equal to the diameter of the optical waveguide (2). To position the tip (40) over the core (3) of the optical waveguide (2), optical methods can be used or the membrane and optical waveguide can be provided with locating elements.
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申请公布号 |
US5966482(A) |
申请公布日期 |
1999.10.12 |
申请号 |
US19970890738 |
申请日期 |
1997.07.11 |
申请人 |
INSTITUT FUER MIKROTECHNIK MAINZ GMBH;OMICRON VAKUUMPHYSIK GMBH |
发明人 |
NOELL, WILFRIED;RUF, ALEXANDER;MAYR, KARSTEN;GUETHNER, PETER |
分类号 |
G01B11/30;G01N37/00;G01Q60/18;G01Q60/22;G02B6/02;(IPC1-7):G02B6/26 |
主分类号 |
G01B11/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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