SINGLE CRYSTAL HOLDING APPARATUS AND SINGLE CRYSTAL HOLDING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a single crystal holding apparatus which obviates the oscillation or inclination of a holder and aligns the axial center of this holder to the axial center of the single crystal at the time of holding the constricted part formed at the holder by means of the holder polling up of the single crystal by a CZ method and a holding method therefor. SOLUTION: The single crystal holder 5 is mounted via a shaft 3 at a single crystal pulling up wire take-up mechanism 11. These members are freely rotatably mounted at a carriage 2. Vertically movable holding rods 6 are disposed in plural hollowed grooves 5a formed within the single crystal holder 5 and the constricted part 19b of the single crystal 19 is held by these holding rods 6. The taking-up speed of the single crystal pulling up wire 15 is controlled to be added or subtracted byαto maintain the single crystal growth rate constant when the carriage for holding the single crystal is elevated and lowered at the speedα. The single crystal weight to the born by the single crystal pulling up wire is controlled in accordance with the detected value of a load cell 7 for the pulling up wire and the single crystal weight to be born by the single crystal group holder in accordance with the detected value of a load cell 4 for the total load.