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发明名称
ETCHING METHOD AND ETCHING APPARATUS
摘要
申请公布号
JPH11279775(A)
申请公布日期
1999.10.12
申请号
JP19980081143
申请日期
1998.03.27
申请人
HITACHI CHEM CO LTD
发明人
SEKIGUCHI HIROSHI;KIMURA YUKIHIRO
分类号
H05K3/06;C23F1/08;(IPC1-7):C23F1/08
主分类号
H05K3/06
代理机构
代理人
主权项
地址
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