| 摘要 |
PROBLEM TO BE SOLVED: To enhance responsiveness and permit a response to a dynamic image by a method wherein both substrates are disposed so that a pixel array layer of an active matrix substrate is opposed to a semiconductor layer of a counter substrate, and also both the substrates are connected to each other by conductive particles having an adhesive property. SOLUTION: In an active matrix substrate 1, there is formed an image array layer comprising an XY matrix-like gate electrode, a source electrode, a thin film transistor 5 serving as a switching element, an electric charge accumulated capacitor, a pixel electrode 14 and the like on a glass substrate. There is formed a semiconductor layer having photoconductivity for radioactive rays such as X-rays, a connection electrode 6 or the like, in a counter substrate 2. Adhesive conductive particles 3 are disposed on a surface of a substrate on at least one side of the active matrix substrate 1 and the counter substrate 2, and the pixel electrode 14 is confronted to the connection electrode 6 so as to face each other, to electrically and physically connect therewith by compression.
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