PIEZOELECTRIC CERAMICS, LAMINATION TYPE PIEZOELECTRIC CERAMICS VIBRATOR AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a lamination type piezoelectric ceramics element, whose sintering temperature is about 1100 deg.C or lower and crystal structure is fine and uniform, and which is excellent in piezoelectric characteristics and mechanical strength; and a piezoelectric ceramics which is proper to be used for it and a lamination type piezoelectric ceramics vibrator. SOLUTION: The piezoelectric ceramics is formed by sintering a composition mainly composed of oxide of metal such as zinc, zirconium and titanium. It comprises Fe and Ag and is constituted of crystal grain whose average crystal grain diameter of apparent crystal structure in its sectional observation image is 1 μm or less, and 80 area % or more of apparent crystal structure is constituted of crystal grain of crystal grain diameter of 1 μm or less.