| 摘要 |
PROBLEM TO BE SOLVED: To stabilize operations of microwaves and milliwaves and lower manufacturing costs by a method wherein a ground conductor connecting wiring formed on a dielectric substrate has an extension part of a predetermined length on at least one outward side of a part to which a ground conductive layer pattern is connected. SOLUTION: An epitaxial is formed on a GaAs semiconductor substrate, and transistors Tr and a resistor R are made in a remaining semiconductor region, and a capacitor C and a ground conductive connection wiring GW are made on a dielectric region. Circuit elements Tr, R, C form a coplanar wiring on the dielectric substrate, and when measuring circuit characteristic, it may be found out that the characteristic deviates. Then, the ground conductive connection wiring is selected so that, when S parameters are converted into Y parameters if the value fluctuates, for example, at about 20%, a wiring path arrangement which can correct the fluctuation is enabled. For example, the length which is longer by 10 μm or more than required is formed on both sides. |
