| 摘要 |
PROBLEM TO BE SOLVED: To manufacture an integrated circuit with an outer-surface branching mirror in high precision through a relatively simple manufacturing process. SOLUTION: A method for the manufacture of an optical integrated circuit which has an outer-surface branching mirror on a substrate 10, is provided with a process for forming a polymer optical material film 11 constituting an optical circuit element on the substrate 10, a process for scanning the polymer optical material film 11 two-dimensionally and directly with an electron beam and a process for removing the polymer optical material film in the area where the optical circuit element is not constituted by development. In the electron beam scanning process, the area where the optical circuit element is not constituted is scanned with a temporally constant energy irradiation quantity and the area where the outer-surface branching mirror is expected to be constituted is scanned while the irradiation energy quantity is varied with the time. |
