Total internal reflection electromagnetic radiation beam entry to, and exit from, ellipsometer, polarimeter, reflectometer and the like systems

摘要

Disclosed are laterally compact ellipsometer, polarimeter, reflectometer and the like material system investigating systems, and methods for their use. Input and output optical elements effect changes in orientation, (propagation direction), of a beam of electromagnetic radiation caused to pass therethrough by an essentially total internal reflection therein. In addition, a propagation direction diverted beam of electromagnetic radiation can be simultaneously, optionally, caused to have a phase retardation entered between orthogonal polarization components thereof by at least one of the input and output optical elements. The present invention enables relatively simple investigation of a sample system with a polarized beam of electromagnetic radiation which impinges thereupon at a less than Brewster Angle, small "spot" size effecting angle-of-incidence, with respect to a normal to a surface of an investigated material system.