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发明名称
LIQUID MATERIAL VAPORIZATION APPARATUS
摘要
申请公布号
JPH11269653(A)
申请公布日期
1999.10.05
申请号
JP19980079259
申请日期
1998.03.26
申请人
SHIMADZU CORP
发明人
YOSHIOKA NAOMI
分类号
H01L21/205;B01J7/02;C23C16/44;C23C16/448;(IPC1-7):C23C16/44
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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