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发明名称
Innenlochsägemaschine
摘要
申请公布号
DE69323304(T2)
申请公布日期
1999.09.30
申请号
DE19936023304T
申请日期
1993.11.27
申请人
SHIN-ETSU HANDOTAI CO., LTD.
发明人
TERASHIMA, SEIICHI;KITA, MASAO
分类号
H01L21/304;B23D59/00;B23D59/02;B28D1/22;B28D5/00;B28D5/02;C30B33/00;(IPC1-7):B23D59/02;B28D7/04
主分类号
H01L21/304
代理机构
代理人
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