SURFACE SCANNING APPARATUS AND METHOD USING CROSSED-CYLINDER OPTICAL ELEMENTS,申请号EP19950942393-传众专利搜索

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发明名称	SURFACE SCANNING APPARATUS AND METHOD USING CROSSED-CYLINDER OPTICAL ELEMENTS
摘要
申请公布号	EP0742895(A4)	申请公布日期	1999.09.29
申请号	EP19950942393	申请日期	1995.11.03
申请人	TENCOR INSTRUMENTS	发明人	GROSS, KENNETH, P.
分类号	G01N21/88;G01N21/95;G01N21/956;(IPC1-7):G01N21/00	主分类号	G01N21/88
代理机构		代理人
主权项
地址

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