| 摘要 |
In forming a single phase CrN film suitable for a barrier film of the copper wiring, the manufacturing conditions for forming the barrier film are determined in advance. The semiconductor device is manufactured using the predetermined conditions. Single phase CrN film is preferred as a barrier film for preventing diffusion and oxidation of the Cu wiring pattern. For example, a CrN film is formed by sputtering under specific conditions in a mixing gas atmosphere of nitrogen/argon gas. The preferred barrier film for the Cu wiring pattern has a narrow nonstoiciometric composition range of Cr:N=1:0.97-0993.
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