发明名称 Probe, manufacturing method therefor and scanning probe microscope
摘要 A tip of a probe is sharpened and a level difference portion 6 in a boundary zone between a base portion 5 and an elastic functioning portion 4 is formed into a tapered configuration. The diameter of the elastic functioning portion 4 is made smaller than that of the base portion 5. Also, a part of the elastic functioning portion 4 is shaped into a constricted configuration. Also, the probe material is an optical fiber and this probe is composed of a core portion 2 that propagates light therethrough and clad portions 3 that differ in refractive index from each other. And the portion of the probe that excludes a aperture is clothed by a metal film cladding 7.
申请公布号 US5960147(A) 申请公布日期 1999.09.28
申请号 US19970821533 申请日期 1997.03.21
申请人 SEIKO INSTRUMENTS INC. 发明人 MURAMATSU, HIROSHI;YAMAMOTO, NORITAKA;CHIBA, NORIO;NAKAJIMA, KUNIO
分类号 G01B11/30;G01N37/00;G01Q20/04;G01Q60/18;G01Q60/22;G01Q60/32;G01Q60/38;G01Q70/10;G01Q70/16;(IPC1-7):G02B6/02;G02B21/00;G01N23/00 主分类号 G01B11/30
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