PROCESS FOR THE MANUFACTURE OF PZT FILMS

摘要

A process for producing PZT films on a substrate by thick-film technique in which the PZT films contain simply modified PZT and/or PZT with complex perovskite. PZT with a Zr content X of X ~ X p + 0.02 ~ X p + 0.10 is used, where X p is the Zr content of the base composition at the morphotropic phase boundary determined by the maximum coupling factor K ~.