发明名称 |
Power MOSFET fabrication process to achieve enhanced ruggedness, cost savings, and product reliability |
摘要 |
This invention shows an improved method for fabricating a MOSFET transistor on a substrate to improve a device ruggedness. The method includes the steps of: (a) forming an epi-layer of a first conductivity type as a drain region on the substrate and then growing an initial oxide layer over the epi-layer; (b) applying an active mask for etching the initial oxide layer to define an active area and forming a gate oxide layer thereon followed by depositing an overlaying polysilicon layer; (c) applying a poly mask for etching the polysilicon layer to define a plurality of poly gates; (d) removing the poly mask and then carrying out a body implant of a second conductivity type followed by performing a body diffusion for forming a plurality of body regions and for growing a thin oxide layer overlaying the ploy gates and silicon surface; (e) depositing a blocking-and-alignment layer of dielectric material with a pre-designated thickness followed by implanting body-dopants of the second conductivity type at an energy level correlating to the thickness of the blocking-and-alignment layer to form a buried body-dopant region at a pre-determined depth in each of the body regions (f) removing the blocking-and-alignment layer followed by applying a source blocking mask for implanting a plurality of source regions in the body regions with ions of the first conductivity type followed by removing the source blocking mask; and (g) forming an insulation layer and applying a high temperature process for densification of the insulation layer and further for actuating a diffusion of the source regions and the deep heavily-doped body-dopant regions. The deep heavily-doped body-dopant regions are formed immediately below the source regions whereby the device ruggedness is improved.
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申请公布号 |
US5960275(A) |
申请公布日期 |
1999.09.28 |
申请号 |
US19960738544 |
申请日期 |
1996.10.28 |
申请人 |
MAGEMOS CORPORATION |
发明人 |
SO, KOON CHONG;HSHIEH, FWU-IUAN |
分类号 |
H01L21/336;H01L29/10;(IPC1-7):H01L21/823 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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