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发明名称
摘要
申请公布号
JP2953666(B2)
申请公布日期
1999.09.27
申请号
JP19890311548
申请日期
1989.11.30
申请人
KYANON KK
发明人
MORISHITA MASAKAZU
分类号
H01L29/73;H01L21/331;H01L29/08;H01L29/737;H01L31/10;(IPC1-7):H01L21/331
主分类号
H01L29/73
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