HEAT TREATING EQUIPMENT,申请号JP19980060956-传众专利搜索

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发明名称	HEAT TREATING EQUIPMENT
摘要
申请公布号	JPH11260742(A)	申请公布日期	1999.09.24
申请号	JP19980060956	申请日期	1998.03.12
申请人	KOKUSAI ELECTRIC CO LTD	发明人	INADA TETSUAKI;INOKUCHI YASUHIRO
分类号	H01L21/22;H01L21/205;(IPC1-7):H01L21/22	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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