PROJECTIVE LENS AND SCANNING EXPOSURE DEVICE,申请号JP19980082625-传众专利搜索

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发明名称	PROJECTIVE LENS AND SCANNING EXPOSURE DEVICE
摘要
申请公布号	JPH11258498(A)	申请公布日期	1999.09.24
申请号	JP19980082625	申请日期	1998.03.13
申请人	NIKON CORP	发明人	SUZUKI KOSUKE
分类号	G02B13/00;G02B7/02;G03F7/20;H01L21/027;(IPC1-7):G02B13/00	主分类号	G02B13/00
代理机构		代理人
主权项
地址

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