| 摘要 |
The micro-sensor contains at least one device for detecting a pressure change and at least two chambers (20,30) filled with a gas. The chambers are connected to each other by at least one channel (40). The channel preferably has a device for detecting a gas flowing in it. The sensor may have at least one region which can be brought to another temperature from that of the gas in the chambers. The micro-sensor is manufactured by generating chambers in a substrate and is then sealed by a flow of a covering material. The channel is provided between the chambers before sealing the cover material.
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