Method of optical projection exposure to light,申请号EP19950118575-传众专利搜索

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发明名称	Method of optical projection exposure to light
摘要
申请公布号	EP0715213(B1)	申请公布日期	1999.09.22
申请号	EP19950118575	申请日期	1995.11.24
申请人	SONY CORPORATION	发明人	SOMEYA, ATSUSHI
分类号	G03F7/20;G03F7/207;H01L21/027;(IPC1-7):G03F7/20	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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