| 摘要 |
<p>An apparatus for manufacturing microlens and a method for manufacturing a microlens using the same are provided to embody quickly the mass-production of a microlens for an image sensor regardless of the size of a wafer and to improve the optimization for the variation of processes without the use of various masks according to the process variation. An apparatus for manufacturing a microlens includes a light source, a diffusion unit, a first reflective unit and a stage. The light source(200) is used for generating a first light. The diffusion unit(220) is used for receiving the first light from the light source and generating a second light with a relatively parallel path in a large range compared with the first light. The first reflective unit is used for receiving partially the second light and generating a third light, wherein the third light is a reflected light. The stage(240) is used for loading a wafer. The stage is used for generating a hologram by receiving simultaneously the second and third lights.</p> |
