| 摘要 |
PROBLEM TO BE SOLVED: To simplify re-teaching work after re-assembly of a cluster tool and repair of an arm robot and detect operation failure automatically. SOLUTION: This conveyance system is provided with a pair of optical sensors 20 (20a, 20b), 21 (21a, 21b) respectively on the top and bottom and both sides of respective cassette module chambers 13a, 13b, whose optical axes intersect at right angles at a reference point inside the chamber. A member gripping part 17 is formed with a plate of almost the same thickness as the optical axis diameter of the optical sensor 21 (21a, 21b), and a reference position gauging hole 23 is formed at the roughly central position on the top and bottom, whose central point serves as an arm reference point 24. When the point meets a chamber reference point 22, the conditions detected by both optical sensors 20, 21 are read by a computing controller connected to them to recognize that both reference points meet each other. The computing controller computes the location of the arm reference point 24 from an encoder connected to respective driving motors of a robot, and compare with the position of the chamber reference point 22 before variation, thereby detecting an error in the chamber position or operation failure of a robot. |
