发明名称 |
Method of making a side alignment mark |
摘要 |
An apparatus in accordance with this invention includes an alignment mark that is formed in a substrate. The alignment mark extends across a dice line so that, upon dicing the substrate, the mark is exposed in the substrate's side edge. The mark is formed at a predetermined distance from a position at which a feature is desired to be formed on the substrate's side edge using a mask. Accordingly, the mark is a positional reference that can be used for highly accurate placement of the feature on the side surface of the substrate with the mask. Preferably, the mark is formed of metal or other material enhanced to a size that is readily detectable by an alignment system with which the mark is to be used. The invention also includes methods for making the alignment mark.
|
申请公布号 |
US5956564(A) |
申请公布日期 |
1999.09.21 |
申请号 |
US19970867837 |
申请日期 |
1997.06.03 |
申请人 |
ULTRATECH STEPPER, INC. |
发明人 |
NEWMAN, THOMAS H;KAPPEL, NORBERT |
分类号 |
G03F9/00;H01L23/544;(IPC1-7):H01L21/306;H01L21/66 |
主分类号 |
G03F9/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|