Vertical cavity surface emitting laser with shaped cavity mirror and method of fabrication

摘要

VCSEL with integrated shaped cavity mirror and method of fabrication including a substrate element, a first stack of distributed Bragg reflectors disposed on a surface of the substrate element, an active region lattice matched to a surface of the first stack of distributed Bragg reflectors, and a second stack of distributed Bragg reflectors lattice matched to a surface of the active region. The active region includes at least one quantum well layer and a plurality of barrier layers. A shaped cavity mirror is integrated with the VCSEL structure being etched directly into an uppermost surface of the second stack of distributed Bragg reflectors to form an unstable resonant laser cavity for use in single mode laser applications, or as a random phase mask for use in multimode laser applications.