发明名称 Method and apparatus for handling liquid chemical waste
摘要 A buffer tank and pre-wetting apparatus prevent a liquid chemical waste from crystalizing on the inside walls of a drain pipe that carries the waste to a waste tank. The pre-wetting apparatus includes a pre-wetting tank with an overflow pipe that leads to the waste tank drain pipe. A water supply is connected to fill the pre-wetting tank to the rim of the overflow pipe and then overflow to wet the inside walls of the drain pipe before waste from the buffer tank is transferred through the overflow pipe and to the drain pipe and the waste tank.
申请公布号 US5954078(A) 申请公布日期 1999.09.21
申请号 US19970822246 申请日期 1997.03.20
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 CHIANG, LIEN-HSIANG;CHEN, YING-HSIANG
分类号 H01L21/00;(IPC1-7):F16K21/00;F16K31/02;B05C7/00 主分类号 H01L21/00
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