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发明名称
摘要
申请公布号
JP2950623(B2)
申请公布日期
1999.09.20
申请号
JP19900414256
申请日期
1990.12.25
申请人
SHINKO DENKI KOGYO KK
发明人
TAKEDA YOSHIKI;FUKASE KATSUYA;TANAKA MASATO;SHIMIZU MITSUHARU
分类号
H01L21/60;H01L23/50;(IPC1-7):H01L23/50
主分类号
H01L21/60
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代理人
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