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发明名称
Verfahren zum epitaktischen Wachsen eines Halbleiterkristalls
摘要
申请公布号
DE69228467(T2)
申请公布日期
1999.09.16
申请号
DE1992628467T
申请日期
1992.11.25
申请人
RESEARCH DEVELOPMENT CORP. OF JAPAN, TOKIO/TOKYO;NISHIZAWA, JUNICHI;ZAIDAN HOJIN HANDOTAI KENKYU SHINKOKAI, SENDAI
发明人
NISHIZAWA, JUN-ICHI;KURABAYASHI, TORU
分类号
C30B25/02;C30B23/02;C30B25/10;C30B25/12;C30B25/16;H01L21/205
主分类号
C30B25/02
代理机构
代理人
主权项
地址
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