A WET APPARATUS FOR A WAFER,申请号KR19960040246-传众专利搜索

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发明名称	A WET APPARATUS FOR A WAFER
摘要
申请公布号	KR100220382(B1)	申请公布日期	1999.09.15
申请号	KR19960040246	申请日期	1996.09.16
申请人	FAIRCHILD KOREA SEMICONDUCTOR LTD.	发明人	CHUN, JAE-WOO;LEE, CHANG-HOON;LEE, DONG-HEE;KIM, BYUNG-TAE
分类号	H01L21/306;(IPC1-7):H01L21/306	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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