| 摘要 |
PROBLEM TO BE SOLVED: To form a metallized pattern in good accuracy with excellent joint strength even after a high temp. treatment such as brazing and soldering by applying a mixture of a brazing material and an active metal on the surface of an aluminum nitride substrate, laminating a metal sheet thereon, heating it and then, removing the brazing material and the metal sheet. SOLUTION: A brazing material having <=45μm average particle size comprising a mixture powder of Ag and 20 to 80 wt.% Cu is mixed with 0.2 to 10 wt.% of active metals having <=45μm average particle size comprising a group IVa and Va metals in the periodical table and their hydrogenated compds. to obtain a mixture. The mixture is uniformly applied to 20 to 50μm thickness on the surface of an aluminum nitride substrate, dried in air at 120 to 200 deg.C and then, a oxygen-free metal plate of 50 to 300μm thickness is laminated on the substrate. The laminated body is heated in <=1×10<-4> Torr vacuum or nonoxidizing atmosphere having <=10 ppm oxygen concn., at a temp. higher than the melting point of the brazing material. Then, the brazing material and the metal sheet are removed.
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